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8226-1999光学零件镀膜.pdf</h1> </div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Adobe Reader 9.0</li> <li>资料大小: 3.7 MB</li> <li>下载次数: 83</li> <li>上传会员: <a href="attachcenter-list.html?uid=115968" target="_blank" style="color:#FF9900">geyingji</a></li> <li>上传时间: 2012-10-23</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-254496-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=ODEzOTd8Njc1NWQ0ODF8MTc2NTkxOTQ0MnwwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=81397', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=81397" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>请教，薄膜湿热试验为什么会膜裂？:</b><div class="postmsg">如题，基底是有色玻璃，镀mgf2，sio2单层膜，做湿热试验，标准上写在40度90%湿度24小时不脱膜，然后我在这环境下放了几天，膜裂挺严重的，有的是密密麻麻的小细裂纹，有的是大裂纹，但是为啥会裂呢，是膜层太松散吸水后裂开了还是有应力啥的，求解，下图是10倍放大镜下的照片</div> <div class="postmsg">氟化物属于软膜 吸潮容易出现问题</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">xiaohuilee 发表于 2012-10-23 13:46</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044325&ptid=254496" target="_blank"><img id="aimg_mlfUf" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 氟化物属于软膜 吸潮容易出现问题</blockquote></div><br /> 哦，可是sio2单层膜的也都裂了</div> <div class="postmsg">玻璃是加热到多少度镀的？有无使用离子源？SIO2的镀膜速率是多少？</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">geyingji 发表于 2012-10-23 14:43</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044343&ptid=254496" target="_blank"><img id="aimg_K1Fni" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 哦，可是sio2单层膜的也都裂了</blockquote></div><br /> MGF2 基地温度要大于150 才能镀出来坚硬的膜 SIO2 是否冲O2了 速率怎样</div> <div class="postmsg">如果使用了离子源 就增加离子源的能量 增加充气量</div> <div class="postmsg">40度90%湿度 不是高的要求，工艺有问题，调整蒸发速率看看</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">ouyuu 发表于 2012-10-23 23:03</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044421&ptid=254496" target="_blank"><img id="aimg_DHgTQ" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 玻璃是加热到多少度镀的？有无使用离子源？SIO2的镀膜速率是多少？</blockquote></div><br /> 这个我不太清除啊，是外面镀的，我们拿回来测，只知道他没有离子源，就是电子枪蒸的，速度啥的都不知道</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">xiaohuilee 发表于 2012-10-24 08:14</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044455&ptid=254496" target="_blank"><img id="aimg_O1GWl" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> MGF2 基地温度要大于150 才能镀出来坚硬的膜 SIO2 是否冲O2了 速率怎样</blockquote></div><br /> 这些我都不知道啊，别人镀的，让我分析原因，sio2肯定没有充氧，如果要求抗潮能力强的话是不是要膜越致密越好</div> <div class="postmsg">這個問題的重點是因為基板是有色玻璃。換普通玻璃用同樣的鍍膜制程就沒問題了！</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">geyingji 发表于 2012-10-24 09:45</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044497&ptid=254496" target="_blank"><img id="aimg_ue7Y0" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 这些我都不知道啊，别人镀的，让我分析原因，sio2肯定没有充氧，如果要求抗潮能力强的话是不是要膜越致密 ...</blockquote></div><br /> 那就简单了 退货就好了 不是你们自己做的 你怎么分析</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">zhenxing 发表于 2012-10-24 11:36</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044525&ptid=254496" target="_blank"><img id="aimg_UblLg" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 這個問題的重點是因為基板是有色玻璃。換普通玻璃用同樣的鍍膜制程就沒問題了！</blockquote></div><br /> 也有基板是普通玻璃的，介质滤光片，就是裂的不是很厉害，也没那么快，差不多做1个星期有的裂纹</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">geyingji 发表于 2012-10-24 16:46</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044580&ptid=254496" target="_blank"><img id="aimg_P9Zp6" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 也有基板是普通玻璃的，介质滤光片，就是裂的不是很厉害，也没那么快，差不多做1个星期有的裂纹</blockquote></div><br /> 那是因為介質Filter沒有IAD的原因才會裂的，如果普通玻璃用同樣的制程呢？<br /> 樓主供貨商的設備太差了，若有需求量大的產品可以找我們代工。<img src="static/image/smiley/Tiger/17.gif" smilieid="155" border="0" alt="" /> </div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">zhenxing 发表于 2012-10-24 16:52</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044583&ptid=254496" target="_blank"><img id="aimg_dLau3" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 那是因為介質Filter沒有IAD的原因才會裂的，如果普通玻璃用同樣的制程呢？<br /> 樓主供貨商的設備太差了，若有 ...</blockquote></div><br /> 介质滤光片是另外一个国外的公司买的，做一两天湿热试验没啥事，时间长了也不行，我是把很多不同厂子镀的放到一起做的试验，只有一两片没有裂，以前看膜裂都是说应力啥的，感觉潮湿对薄膜的影响挺大的，这方面资料也没找到，就是不太明白为什么潮湿会使膜裂呢，什么原理呢</div> <div class="postmsg">用离子源会好些。<br /> 一个是膜层更致密，另外一个颜色更透明。<br /> 镀SIO2的时候，是离子形式沉积的，会发生一些不均匀的情况，<br /> 这时候补些氧会有好处。</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">ouyuu 发表于 2012-10-25 22:41</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1044866&ptid=254496" target="_blank"><img id="aimg_xNTNx" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 用离子源会好些。<br /> 一个是膜层更致密，另外一个颜色更透明。<br /> 镀SIO2的时候，是离子形式沉积的，会发生一些 ...</blockquote></div><br /> 我没太听明白，你说的“镀sio2的时候，是离子形式沉积的，会发生一些不均匀”是说离子溅射镀膜不均匀么？我看好多说蒸发镀氧化物容易失氧然后才充的氧，然后也做离子辅助的工作气体。假如用离子溅射充氩气可不可以？对sio2有没有影响？</div> <div class="postmsg">ps:先谢过各位了，给了很多好的建议和改善方法~~先歇个周末再说，哈哈，周末愉快~</div> <div class="postmsg">哈哈,楼上最经典,退货.膜裂一般都是吸潮后出现的状态,用离子源镀的基本没这个问题,当然也要看你用的什么离子源还有功率的问题,SIO2冲氧不够也有这个问题,MGF2的基底温度不够也会造成膜硬度不够.</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">geyingji 发表于 2012-10-26 16:16</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1045022&ptid=254496" target="_blank"><img id="aimg_A0VRR" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 我没太听明白，你说的“镀sio2的时候，是离子形式沉积的，会发生一些不均匀”是说离子溅射镀膜不均匀么？ ...</blockquote></div><br /> 镀膜其实是一种气相沉积。<br /> 镀膜时并不存在SIO2分子，<br /> 而是SI离子和O离子的形式蒸发上去的，<br /> 因为电场作用，难免会发生一些沉积不均匀的情况———<br /> 有的地方SI多一些，有的地方O多一些<br /> （多余的O变成气体跑掉了，所以不会带来问题，但SI过多颜色会发黑）<br /> <br /> 用O2做气源，用离子辅助镀膜，就是避免发生SI过多的情况，<br /> 离子源的另一个好处是膜更致密。<br /> <br /> 离子源有两个指标，阳极电流和阳极电压，<br /> 电流和离子密度成正比，电压和离子速度成正比。</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">ouyuu 发表于 2012-10-26 21:07</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1045065&ptid=254496" target="_blank"><img id="aimg_lR0Cx" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 镀膜其实是一种气相沉积。<br /> 镀膜时并不存在SIO2分子，<br /> 而是SI离子和O离子的形式蒸发上去的，</blockquote></div><br /> 啊，为什么没有sio2分子啊，不是加热让sio2升华么，我理解的是太热的话sio2会分解成sio或者si和o2，但是不能全是离子吧（就拿普通的电子束蒸发来说）</div> <div class="postmsg">1、镀氟化镁，基底温度应在250~300度，且镀膜时真空度要高；<br /> 2、sio2镀膜出现脱模，与加工工艺条件关系较大。</div> <div class="postmsg">是啊，不是自己镀的，怎么找原因啊</div> <div class="postmsg"><div class="quote"><blockquote><font size="2"><font color="#999999">chao_li0622 发表于 2012-11-20 18:43</font> <a href="http://forum.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1049229&ptid=254496" target="_blank"><img id="aimg_TUM3j" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" src="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" onload="thumbImg(this)" border="0" alt="" /></a></font><br /> 是啊，不是自己镀的，怎么找原因啊</blockquote></div><br /> 是啊，我也查了些资料，加上好多的回帖，也大概了解保证薄膜稳定性、抗潮的一些工艺要素。但主要不是让我找镀膜工艺导致薄膜受潮膜裂的原因（像衬底温度、离子源辅助之类的），是为什么薄膜受潮会膜裂，因为是我做得湿热试验，要解释这个现象，您能明白我的意思么，比如说是因为薄膜缝隙吸水后应力变大、还是说膜料会水解之类的。</div> <div style="height200px;"></div> <ul class="xl xl2 cl" style="border-top: 1px #cccccc dashed;margin:5px 0 ;padding-top:5px"> <dl><b> 同一主题资料:</b></dl><dl class='icon'><img src="static/image/filetype/pdf.gif" border="0" class="vm" alt="" /> <a href="attachcenter-page.html?aid=81397" title="JB T 8226-1999光学零件镀膜.pdf">JB T 8226-1999光学零件镀膜.pdf</a> <font color="#AAAAAA">(3.7 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