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</div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Adobe Reader 9.0</li> <li>资料大小: 1.73 MB</li> <li>下载次数: 17</li> <li>上传会员: <a href="attachcenter-list.html?uid=6" target="_blank" style="color:#FF9900">遗忘的回忆</a></li> <li>上传时间: 2015-07-12</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-270803-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=ODgyMjV8ZTU1ZTgzODN8MTc2NTkyMzA1NnwwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88225', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88225" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>真空镀膜机控制系统的温控改造:</b><div class="postmsg">真空镀膜机控制系统的温控改造<br /> Control System Reforming of Vacuum Coating Equipment on Temperature<br /> 下载全文<br /> <br /> 作 者：刘嘉滨[1] 沈学浩[1] 王晓玲[2]<br /> LIU Jia-bin,SHEN Xue-hao,WANG Xiao-ling （1. Department of Physics and Astronomy; 2. School of Media ＆ Design, Shanghai Jiaotong University, Shanghai 200240, China）<br /> 机构地区：[1]上海交通大学物理与天文系,上海200240 [2]上海交通大学媒体与设计学院,上海200240<br /> 出 处：《实验室研究与探索》 2014年第33卷第12期 49-53页,共5页<br /> Laboratory Research and Exploration<br /> 摘 要：在有限的教学经费及传统真空镀膜设备不报废的条件下,结合实际实验教学需要,对设备进行针对性的改造,使其能最大化使用。DM-240型真空镀膜机的扩散泵采用的是水冷却系统,但在实验结束过程中,需要人工判断扩散泵是否冷却,然后进行设备与水路系统的关闭操作,并且该过程占据相当的实验时间,影响到实验教学质量。针对扩散泵冷却控制系统进行温控自动化改造,利用温度控制和阀门控制设备,实现对扩散泵冷却系统温度的监控,并可自动关闭水冷却系统与机组设备,做到无人值守。不仅为实验教学提供了充足的实验时间,也可有效地避免因误操作而造成对设备的损坏。<br /> Vacuum experiment is an important experiment. But facing on the heavy task of experimental teaching and stressful teaching hours,the traditional vacuum equipment cannot meet the experiment teaching work because of various reasons. In the condition of the limited funds and the vacuum equipments that cannot scrapped,the equipments should carry out targeted transformation due to the actual needs of experimental teaching. The diffusion pump of DM-240 uses a cooling water system,but in the end of the experiment process,it needs manually determine whether to cool,then the equipment and the water system can be shutdown. Because the process needs long time,it affects the quality of experimental teaching. Therefore the diffusion pump cooling control system should be transformed into temperature automation control system. Through to monitor the temperature of diffusion pump,it can automatically shut off the cooling water system and unit equipment. 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