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<DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=14941', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=14941" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>蓝宝石衬底的化学机械抛光技术的研究 PDF:</b><div class="postmsg">王银珍,周圣明,徐 军<br /> (中国科学院上海光学精密机械研究所,上海201800)<br /> 摘要:介绍了蓝宝石衬底的化学机械抛光工艺,概述了化学机械抛光原理和设备,讨论分析了影响蓝宝石衬底化学<br /> 机械抛光的因素,阐述了CMP 的主要发展趋势:能定量确定最佳CMP 工艺,系统地研究CMP 工艺过程参数,建立完<br /> 善的CMP 理论模型,满足不同的工艺要求和应用领域,有效降低成本,提高产量。<br /> 关键词:蓝宝石;衬底;化学机械抛光<br /> 中图分类号:O786 文献标识码:A 文章编号:10002985X(2004) 0320441207<br /> <br /> 来源于<人工晶体学报>2004年第6期</div> <div class="postmsg">看看再说，希望能有个比较全面的介绍</div> <div class="postmsg">都是分析,没有能参考的数据.<br /> 不过谢楼主分享了!</div> <div class="postmsg">我像毛主席保证，这个贴也是无肉的，最多有点毛皮，但还是要谢谢楼主。</div> <div class="postmsg">我向马克思保证，这个贴连点点皮毛都不会有的</div> <div class="postmsg">好东西，学习学习下<img src="static/image/smiley/default/em17.gif" smilieid="46" border="0" alt="" /> <img src="static/image/smiley/default/em17.gif" smilieid="46" border="0" alt="" /></div> <div class="postmsg">这篇文章我看过，无血无肉，最多有几根毛。</div> <div class="postmsg">呵呵，化学抛光是需要的，MONOCRYSTAL 使用的就是 2道 双端面研磨，1道粗研磨，2道CMP研磨，<br /> <br /> 使用的就是我们公司的设备。 哈哈</div> <div class="postmsg">MONO在加工衬底的过程中可能还有一道工艺吧？<br /> <br /> 梦游中，胡言乱语！</div> <div class="postmsg">这篇文章的主要内容是抄的一篇美国大学的博士论文的内容.</div> <div class="postmsg">上海光机所如果能够把这个文章拿出来，就说明没有技术含量。<br /> <br /> 不然，谁愿意把重要信息外泄啊。</div> <div class="postmsg">呵呵，化学抛光CMP的确重要，谁要这个CMP的研磨液啊？（我小声的问，我能提供，MONO就有用）</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a 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