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</div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Adobe Reader 9.0</li> <li>资料大小: 667.27 KB</li> <li>下载次数: 27</li> <li>上传会员: <a href="attachcenter-list.html?uid=6" target="_blank" style="color:#FF9900">遗忘的回忆</a></li> <li>上传时间: 2015-07-12</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-270841-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=ODgyNjB8ODFiNzFkZWR8MTc2NTg5NjQxN3wwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88260', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88260" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>管状构件内表面真空镀膜方法研究进展:</b><div class="postmsg">管状构件内表面真空镀膜方法研究进展<br /> Progress on the Study of Vacuum Coating Methods for the Inner Surface of Tubular Workpiece<br /> 下载全文<br /> <br /> 作 者：赵彦辉[1] 贾莹[2] 于宝海[1] 肖金泉[1]<br /> ZHAO Yan-hui, JIA Ying, YU Bao-hai , XIAO Jin-quan （ 1. Division of Surface Engineering of Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China; 2. Shenyang Blower Works Group Co., Ltd, Shenyang 110869, China）<br /> 机构地区：[1]中国科学院金属研究所专用材料与器件研究部,沈阳110016 [2]沈阳鼓风机集团股份有限公司,沈阳110869<br /> 出 处：《表面技术》 CSCD 2014年第43卷第2期 118-125页,149页,共9页<br /> Surface Technology<br /> 基 金：国家自然科学基金资助项目（51171197）<br /> 摘 要：综述了国内外真空镀膜方法，包括化学气相沉积与物理气相沉积方法对管状构件内表面镀膜的研究进展．介绍了热化学气相沉积及各种等离子体（包括直流、射频及电子自旋共振等离子体）增强化学气相沉积方法在管状构件内表面镀膜方面的应用。分析了这种方法的优缺点；重点阐述了溅射镀膜方法（包括直流二极（或三极）溅射、磁控溅射及离子束（或激光束）溅射）及电弧离子镀技术在管状构件内表面镀膜时对薄膜种类、沉积速率、薄膜厚度轴向均匀性、鹰毛／基结合力等方面的特点。最后对管状构件内表面各种真空镀膜方法进行了分析对比，指出了存在的问题及今后的发展方向。<br /> In this paper, research progress of vacuum coating methods including physical vapor deposition （PVD） and chemical vapor deposition （CVD） were reviewed for the inner surface protection of tubular workpieces. Thermal CVD and various kinds of plasma-enhanced CVD （PECVD）including direct current plasma, radio-frequency plasma and electron spin resonance （ECR） plasma were introduced, and the advantages and disadvantages of these methods were analyzed. The study was mainly focused on the effects of sputtering method （including direct current diode （tripolar） sputtering, magnetron sputtering and ion beam （laser beam） sputtering） and arc ion plating technique for the inner surface coating of tubular workpieces on the film type, film deposition rate, axial uniformity of film thickness and film/substrate adhesion, etc.. Finally, the CVD and PVD methods for the inner surface coating of tubular workpieces were analyzed and compared, and the existing problems at present and developing direction in the fu- ture were presented.<br /> 关键词：管状构件 内表面 物理气相沉积 化学气相沉积<br /> tubular workpiece ; inner surface ; physical vapor deposition （PVD） ; chemical vapor deposition （CVD） ;</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-16 22:46 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <script src="home.php?mod=misc&ac=sendmail&rand=1765896417" type="text/javascript"></script> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1765896417|656997f44a8a37c814b526f0f9b9eee3|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>