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</div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Adobe Reader 9.0</li> <li>资料大小: 279.5 KB</li> <li>下载次数: 48</li> <li>上传会员: <a href="attachcenter-list.html?uid=6" target="_blank" style="color:#FF9900">遗忘的回忆</a></li> <li>上传时间: 2015-07-12</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-270839-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=ODgyNTh8MzFjOTY0MDN8MTc2NTg5NjU1OHwwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88258', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88258" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>半球形基底镀膜膜厚均匀性理论分析:</b><div class="postmsg">半球形基底镀膜膜厚均匀性理论分析<br /> Theory Analysis of Vacuum Evaporation of Thin Film with Uniform<br /> 下载全文<br /> <br /> 作 者：吴伟 王济洲 熊玉卿 王多书 冯煜东<br /> Wu Wei, Wang Jizhou ,Xiong Yuqing, Wang Duoshu, Feng Yudong （ Science and Technology on Surface Engineering Laboratory, Ianzhou Institute of Space Technology and Physics, Ianzhou 730000, China）<br /> 机构地区：兰州空间技术物理研究所表面工程技术重点实验室,兰州730000<br /> 出 处：《真空科学与技术学报》 EI CSCD 2014年第4期 320-324页,共5页<br /> JOurnal of Vacuum Science and Technology<br /> 基 金：重点实验室基金重点项目（9140C540302120c5401）<br /> 摘 要：对特殊的非平面基片一半球表面上镀制薄膜的膜厚均匀性进行了理论分析研究。首先，推导了半球面静止时球面各点的膜厚方程以及此时半球面能够镀膜的区域。然后推算了半球表面沿通过球心竖直方向的轴转动后球面各位置处的膜厚方程，另外当蒸发源与球心的水平距离小于半球面半径时，存在一定区域无法镀膜，对该区域进行了理论计算。最后通过计算相对膜厚分析了半球表面膜层厚度分布情况。选择合适的蒸发源与基底间的几何配置可获得小范围内相对较为均匀的镀膜区域。该研究工作对半球面这种复杂的非平面基片上镀膜膜厚均匀性研究工作具有理论指导意义，同时对改善此种表面上的膜厚分布研究提供了相关的理论依据。<br /> The synthesis of coatings,grown by vacuum evaporation on hemispherical substrate, was physically mod-eled and analytically investigated. First, the formulae, describing the film thickness distribution deposited with a point-sottrceon the stationary substrate, were derived. Next,the film thickness distribution on the substrate spinning on its verti- cal axis was calculated. And fmally, with these formulae the uniformity of film thickness distribution on the hemispherical surface was calculated by evaluating the relative film thickness. The ＂blind＂area on substrate was evaluated, where the film fails to be deposited because the distance between the evaporation source and substrate center（with h and n denoting the vertical and horizontal components of the distance, respectively） is smaller than substrate radius（ R ）. The calculated results show that the source geometry and ratios of h/R and n/R strongly affect the film thickness distribution. We sug-gest that when it comes to growth of film with uniform thicknessin a small area,an optimized alignment of the hemispheri- cal substrate and a right type of source may do a good job.<br /> 关键词：膜厚均匀性 半球形基底 真空镀膜 理论分析<br /> Thickness unifomaity, Hemispherical substrate, Film deposition, Theory analysis ;</div> <div class="postmsg">真传一句话假传万卷书，看的眼花。</div> <div class="postmsg">什么垃圾文章，看了跟没看一样！根本就没有帮助，文章所讨论的问题还是一样没解决！</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-16 22:49 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <script src="home.php?mod=misc&ac=sendmail&rand=1765896558" type="text/javascript"></script> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1765896558|5790619bc3723d88ace90bc2ea37d6c7|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>