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</div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Adobe Reader 9.0</li> <li>资料大小: 246.91 KB</li> <li>下载次数: 6</li> <li>上传会员: <a href="attachcenter-list.html?uid=6" target="_blank" style="color:#FF9900">遗忘的回忆</a></li> <li>上传时间: 2015-07-12</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-270805-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=ODgyMjd8MjNlYmNkODN8MTc2NTg5NjQwOXwwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88227', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88227" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>倒圆锥面基底蒸发镀膜均匀性理论分析:</b><div class="postmsg">倒圆锥面基底蒸发镀膜均匀性理论分析<br /> THEORY STUDY OF FILM THICKNESS DISTRIBUTION ON INVERTED CONICAL SURFACE WITH THE EVAPORATION SOURCE UNDER SUBSTRATE<br /> 下载全文<br /> <br /> 作 者：徐嶺茂 王济洲 熊玉卿 何延春<br /> XU Ling-mao, WANG Ji-zhou, XIONG Yu-qing, HE Yan-chun （Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Space Technology and Physics, Lanzhou Gansu 730000, China）<br /> 机构地区：兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000<br /> 出 处：《真空与低温》 2014年第20卷第6期 340-343页,共4页<br /> Vacuum and Cryogenics<br /> 摘 要：通过计算得出了蒸发源位于倒圆锥面正下方外部镀膜时锥面上各点的膜厚方程，并对整个锥面上膜厚均匀性进行了理论分析。结果表明：当圆锥面形状固定时，蒸发源与圆锥底圆圆心距离增大使锥面上膜厚均匀性变好；当蒸发源固定时，增大底圆半径导致锥面上膜厚均匀性变差。在同样的配置下，蒸发源为点源或小平面源时锥面上膜厚均匀性的变化趋势一致，小平面源蒸镀比点源蒸镀时圆锥面上膜厚均匀性差。<br /> The theory study of film thickness distribution deposited on inverted conical surface with the evaporation source directly below the substrate is reported. The film thickness on every position of the cone and the film thickness uni-formity of the cone can be received by calculation under different geometric configuration. The results show when the evaporation source is point source or small plane source and conical surface shape is fixed,the film thickness uniformity of cone becomes better as the distance of evaporation source and central of the cone bottom. And when the evaporation source is fixed,the increase of cone bottom radius results to film thickness uniformity of cone becomes worse. Under the same configuration,the thickness uniformity of cone with small plane source is worse than point source.<br /> 关键词：膜厚分布 倒圆锥面 真空蒸发镀膜<br /> thickness distribution ;inverted conical surface ;film deposition evaporation ;</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-16 22:46 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <script src="home.php?mod=misc&ac=sendmail&rand=1765896409" type="text/javascript"></script> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1765896409|47367f3ce1375eb776996e3b61c0ed02|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>