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'链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=88146" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>硅单晶抛光片边缘亮线研究:</b><div class="postmsg">硅单晶抛光片边缘亮线研究<br /> <br /> Research of Light Point Defects on Polished Silicon Wafer Edge<br /> 下载全文<br /> 作 者：王云彪 杨洪星 陈亚楠 张伟才<br /> WANG Yun-biao, YANG Hong-xing, CHEN Ya-nan, ZHANG Wei-cai （ The 46th Research Institute of CETC, Tianjin 300220, China ）<br /> 机构地区：中国电子科技集团公司第四十六研究所,天津300220<br /> 出 处：《电子工艺技术》 2014年第5期 298-302页,共5页<br /> Electronics Process Technology<br /> 基 金：天津市青年基金项目（项目编号：12JCQNJC01700）.<br /> 摘 要：随着集成电路用晶圆向大尺寸化方向发展，国内10～15 cm硅抛光片市场竞争日益激烈，外延及器件厂家对抛光片的表面质量和可利用率要求越来越高。边缘亮线是一种存在于硅片抛光面边缘的腐蚀缺陷，对抛光片的成品率及后续工艺质量有重要影响。通过对硅片边缘表面形貌进行微观分析，揭示了“边缘亮线”产生的机理，分别研究了抛光工艺条件和倒角工艺条件对边缘缺陷的影响，通过优化抛光工艺条件，消除了抛光片表面“边缘亮线”缺陷。<br /> With the development of integrated circuit wafer to the large size, the domestic 10~15 cm silicon wafer market competition is becoming increasingly fierce, the epitaxy and the device manufacturers demand better surface quality and higher availability. Edge Bright Line is corrosion defects existing in the edge of polishing wafer surface, have an important influence on the polishing wafer yield and subsequent process quality. Through the micro analysis of the edge of the wafer surface, revealed the Edge Line mechanism, the influence of polishing process conditions and grinding process conditions on the edge defects were studied, by optimizing the polishing process conditions, eliminated the Edge Bright Line defects on polished wafers.<br /> 关键词：边缘亮线 表面形貌 成品率 抛光片</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-17 05:10 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <script src="home.php?mod=misc&ac=sendmail&rand=1765919457" type="text/javascript"></script> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1765919457|23dce284d6eacd5caa73b3f26df2473d|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>