夹紧力作用下镜面变形及夹紧重复性研究:夹紧力作用下镜面变形及夹紧重复性研究
Investigation of Surface Deformation under Clamping Force and Clamping Repeatability
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作 者:周连生 于新峰 张巍
Zhou Liansheng,Yu Xinfeng,Zhang Wei(State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China)
机构地区:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033
出 处:《激光与光电子学进展》 CSCD 2015年第52卷第1期 186-191页,共6页
Laser & Optoelectronics Progress
基 金:国家科技重大专项(2009zx02205)
摘 要:利用有限元方法对运动学支撑夹紧力引起的镜片光学表面变形进行静力学分析,并应用Zernike多项式对镜片表面的变形进行了拟合。结果表明,夹紧力作用下镜片表面产生的几种主要像差为Defocus、Pri Trefoil和Pri Hexafoil。光学检测过程中,运动学支撑结构的重复装配误差可能会影响检测精度,因此分析了运动学支撑夹紧重复性对镜面面形的影响。以夹紧力大小、夹紧力径向位置、夹紧力周向位置变化引起的镜面表面峰谷(PV)值和均方根(RMS)值的变化作为评价夹紧重复性的依据。分析结果表明,镜片表面的PV值和RMS值变化不明显,说明所设计的运动学支撑结构在多次重复性的检测中允许装配过程存在一定的误差。
Geometrical deformation of lens surface caused by kinematic mount clamping force is analyzed with finite element method and lens surface displacements are extracted and fitted with Zernike polynomials. Analytical results show that Defocus, Pri Trefoil and Pri Hexafoil are the main aberrations under clamping force. During the process of optical testing, repeating assembly of the kinematic mount apparatus may influence the testing accuracy, so relations between assembly repeatability and surface deformation are also investigated. In order to evaluate the repeatability for assembling, variations of peak valley (PV) and root mean square (RMS) values changed with clamping force and clamping placement in circumferential and radial direction are also shown in this paper. The results indicate that PV and RMS values do not obviously change as clamping force and clamping placement change, which means that slight assembly errors of the kinematic mount apparatus are allowed.
关键词:光学设计 镜面变形 运动学支撑 夹紧力 夹紧重复性 有限元法 Zernike多项式
optical design ; deformation of lens surface ; kinematic mount ; clamping force ; assembly repeatability ; finite element method ; Zernike polynomials ;