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Wuhan Vocational College Of Software And Engineering,Wuhan 430074,China; 2. Laser application institute of Wuhan Vocational College Of Software And Engineering, Wuhan 430074, China）<br /> 机构地区：[1]武汉软件工程职业学院,武汉430074 [2]武汉软件工程职业学院激光应用技术研究所,武汉430074<br /> 出 处：《激光杂志》 CSCD 2015年第36卷第1期 132-134页,共3页<br /> Laser Journal<br /> 摘 要：对激光精密加石英玻璃切割工艺进行了实验研究,探讨了不同的工艺参数对加工效果的影响。首次使用1064nm皮秒激光器作为光源,对厚度为0.3mm的石英玻璃片进行了激光划线切割。在激光功率20w,占空比60%,频率100kHz,加工速度700mm/s时,获得样品正面崩边11.08um,背面崩边7.610um,侧面粗糙度为4 um 的加工效果。分析了不同工艺参数对样品加工效果的影响,依据实验结果,得到满足实际加工要求的最佳工艺参数。<br /> The processing of laser precision cutting quarts glass has been researched, the processing effects influ-enced by different parameters have been discussed. Use a 1064nm picosecond laser as light source,scribe cutting the quarts glass which thickness is 0. 3mm. Under the laser power 16w,duty ratios 60%,frequence 100kHz,scrbing speed 700mm/s,We get sample which oberse side edge collapse 11. 08um,back side edge collapse 7. 610um and side rough-ness 4um. The processing effects by different parameters have been analyzed, According to the experimental results, the best processing parameters has been given.<br /> 关键词：玻璃切割 皮秒激光 工艺研究 工艺参数<br /> Picosecond laser ;Quarts glass cutting <img src="static/image/smiley/default/titter.gif" smilieid="9" border="0" alt="" />rocessing researched <img src="static/image/smiley/default/titter.gif" smilieid="9" border="0" alt="" />rocessing parameters ;</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-16 22:50 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1765896640|cedacdcb294e7e1f04e9c113e5e2419e|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>