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求助！康宁7980的材料特性: 7980.pdf

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求助！康宁7980的材料特性:

各位仁兄！
小弟想知道康宁7980的材料特性。
由于个人不太懂，想买石英材料，也想学习学习。
哪位朋友有可以发份资料给我么？
xuyi0829@sina.com
QQ57554492
在此感谢

HPFS® KrF Grade, Corning code 7980, is a high purity
synthetic amorphous silicon dioxide manufactured by flame
deposition. The noncrystalline, colorless, silica glass combines
a very low thermal expansion coefficient with excellent
optical qualities and exceptional transmittance in the
deep ultraviolet. KrF Grade was developed for 248 nm
lithography systems. In order to satisfy the challenging
quality requirements of our customers in leading edge
applications such as microlithography, Corning is dedicated
to continuous improvement. Our investments in research
and development, combined with Corning’s quality systems,
support our technology leadership position and ensure that
we meet our customer’s requirements on time, every time

本帖最后由 marcsle 于 2011-3-9 16:07 编辑

Quality Grade Selection Chart — HPFS® KrF Grade
Corning defines and certifies the quality of HPFS® glass using two criteria: inclusions and homogeneity grade.
Inclusion Class Homogeneity 3,4 ppm
Grade
Class Total Inclusion1
Cross Section [mm2] Maximum2 Size [mm] AA
≤ 0.5
A
≤ 1
C
≤ 2
F
≤ 5
0 ≤ 0.03 0.10 n n n n
1 ≤ 0.10 0.28 n n n
2 ≤ 0.25 0.50 n n
NOTES:
1. Defines the sum of the cross section in mm2 of inclusions per 100 cm3 of glass.
Inclusions with a diameter ≤ 0.10 mm are disregarded.
2. Refers to the diameter of the largest single inclusion.
3. Index homogeneity: the maximum index variation (relative), measured over the clear
aperture of the blank.
4. Index homogeneity is certified using an interferometer at 632.8 nm. The numerical
homogeneity is reported as the average through the piece thickness. Blanks with a
diameter up to 450 mm can be analyzed over the full aperture. Larger parts can be
analyzed using multiple overlapping apertures. The minimum thickness for index
homogeneity verification is 20 mm.
For thinner parts, the parent piece is certified.
Elastic (Young’s) Modulus 72.7 GPa
Shear Modulus 31.4 GPa
Modulus of Rupture, abraded 52.4 MPa
Bulk Modulus 35.4 GPa
Poisson’s Ratio 0.16
Density 2.201 g/cm3
Knoop Hardness (100 g load) 522 kg/mm2
Softening Point 1585ºC (107.6 poises)
Annealing Point 1042ºC (1013 poises)
Strain Point 893ºC (1014.5 poises)
Thermal Conductivity 1.30 W/m K
Thermal Diffusivity 0.0075 cm2/s
Average C.T.E.
0.52 ppm/K
0.57 ppm/K
0.48 ppm/K
5ºC-35ºC
0ºC-200ºC
-100ºC-200ºC
Mechanical and Thermal Properties:
Unless otherwise stated, all values @ 25ºC
Chemical Durability and Impurities
Solution Time Weight Loss
[mg/cm2] Impurities
5% HCL by weight @ 95ºC 24 h < 0.010 OH content (by weight): 800-1000 ppm
5% NaOH @ 95ºC 6 h 0.453 Impurities other than OH: ≤ 500 ppb
0.02N NA2CO3 @ 95ºC 6 h 0.065
0.02N H2SO4 @ 95ºC 24 h < 0.010
Deionized H2O @ 95ºC 24 h 0.015
10% HF by weight @ 25ºC 20 m 0.230
10% NH4F*HF by weight @ 25ºC 20 m 0.220
Mechanical and Thermal Properties:
Unless otherwise stated, all values @ 25 ºC
Elastic (Young’s) Modulus 72.7 GPa Softening Point 1585 ºC (107.6 poises)
Shear Modulus 31.4 GPa Annealing Point 1042 ºC (1013 poises)
Modulus of Rupture, abraded 52.4 MPa Strain Point 893 ºC (1014.5 poises)
Bulk Modulus 35.4 GPa Thermal Conductivity 1.30 W/m K
Poisson’s Ratio 0.16 Thermal Diffusivity 0.0075 cm2/s
Density 2.201 g/cm3 Average C.T.E. 0.52 ppm/K 5ºC-35 ºC
Knoop Hardness (100 g load) 522 kg/mm2 0.57 ppm/K 0ºC-200 ºC
0.48 ppm/K -100ºC-200 ºC
Chemical Durability and Impurities
Weight Loss
Solution Time [mg/cm2] Impurities
5% HCL by weight @95 ºC 24 h <0.010 OH content (by weight): 800-1000 ppm
5% NaOH @95 ºC 6 h 0.453 Impurities other than OH: ≤ 500 ppb
0.02N NA2CO3 @95 ºC 6 h 0.065
0.02N H2SO4 @95 ºC 24 h <0.010
Deionized H2O @95 ºC 24 h 0.015
10% HF by weight @25 ºC 20 m 0.230
10% NH4F*HF by weight @25 ºC 20 m 0.220
Internal Transmittance: Code 7980 KrF Grade
HPFS® KrF Grade is certified to meet
Ti ≥ 99.8%/cm@248nm when measured
through a polished, uncoated sample.
A typical internal transmittance curve
for HPFS® KrF Grade fused silica
is shown here.
100.00
99.95
99.90
99.85
99.80
Ti [%/cm]
240 260 280 300 320 340 360 380 400
wavelength [nm]
Internal Transmittance: Code 7980 KrF Grade
HPFS® KrF Grade is certified to
meet Ti ≥ 99.8%/cm @248 nm
when measured through a polished,
uncoated sample.
A typical internal transmittance
curve for HPFS® KrF Grade fused
silica is shown here.
Wavelength
[air]
λ [nm]
Refractive
Index *2
n
Thermal
Coefficient
Δn/ΔT*3 (ppm/K)
1128.64 1.448870 9.6
1064.00 1.449633 9.6
1060.00 1.449681 9.6
1013.98 nt 1.450245 9.6
852.11 ns 1.452469 9.7
706.52 nr 1.455149 9.9
656.27 nC 1.456370 9.9
643.85 nC´ 1.456707 10.0
632.80 nHe-Ne 1.457021 10.0
589.29 nD 1.458406 10.1
587.56 nd 1.458467 10.1
546.07 ne 1.460082 10.2
486.13 nF 1.463132 10.4
479.99 nF´ 1.463509 10.4
435.83 ng 1.466701 10.6
404.66 nh 1.469628 10.8
365.01 ni 1.474555 11.2
334.15 1.479785 11.6
312.57 1.484514 12.0
308.00 1.485663 12.1
248.30 1.508433 14.2
248.00 1.508601 14.2
214.44 1.533789 17.0
206.20 1.542741 18.1
194.17 1.559012 20.4
193.40 1.560208 20.5
193.00 1.560841 20.6
184.89 1.575131 22.7
Refractive Index and Dispersion
Data in 22ºC in 760mm Hg dry nitrogen gas
*1 Polynomial Equation: n2 = A0 + A1 λ4 + A2 λ2 + A3 λ-2 + A4 λ-4 +A5 λ-6 + A6 λ-8 + A7 λ-10 with λ in μm
*2 Sellmeier Equation: n2-1 = B1 λ2/(λ2-C1) + B2 λ2/(λ2-C2) + B3 λ2/(λ2-C3) with λ in μm
*3 Δn/ΔT Equation (20-25ºC) = C0 + C1 λ-2 + C2 λ-4 + C3 λ-6 with λ in μm

谢谢。您这个我下载不了不知道怎么回事。

http://www.corning.com/specialtymaterials/advanced_optics/specialty_glass_ceramics/products/HPFS/index.aspx

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求助！康宁7980的材料特性: 7980.pdf