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Theory.pdf</h1> </div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Adobe Reader 9.0</li> <li>资料大小: 240.38 KB</li> <li>下载次数: 555</li> <li>上传会员: <a href="attachcenter-list.html?uid=84100" target="_blank" style="color:#FF9900">Ion.source</a></li> <li>上传时间: 2009-10-08</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-93959-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=NDYzNzN8ZGM5ZTBjZTV8MTc2NjIzNzAwMHwwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=46373', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=46373" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>离子源原理资料:</b><div class="postmsg"><i class="pstatus"> 本帖最后由 Ion.source 于 2009-10-8 16:04 编辑 </i><br /> <br /> 这是离子源的基本原理,希望为刚刚接触离子源的朋友提供帮助,也希望为已经是离子源高手的朋友能更加深刻的理解离子源提供一点点帮助.</div> <div class="postmsg">下了多谢<br /> //////////////////////////////////</div> <div class="postmsg">下了,谢谢楼主<br /> 确实是好东东,以前看了很多关于离子源的帖子和一些资料,但是都不如这个资料详细,我感觉看了之后,对离子源有了更清晰的理解,特别是Veeco的射频离子源, 一点遗憾是没有包含霍尔离子源,不知道楼主是否有这方面的资料,多谢!</div> <div class="postmsg">To Dacaoren:<br /> 相对于射频离子源和DC离子源, 霍尔离子源就简单多了,就是磁电和中和,注意和电子枪干扰,不会象射频那样复杂,典型的是Veeco的Mark系列霍尔离子源,空心阴极和灯丝的,如果遇到这方面的问题可以和我联系,免费提供技术支持.</div> <div class="postmsg">多谢了；；；；；//////。。。。。。。。。。。。</div> <div class="postmsg">搂主有没有Mark II的空心阴极的资料 原理 结构等资料 TKS</div> <div class="postmsg">学习看能不能把离子源拆开再装上，呵呵</div> <div class="postmsg">看来楼主对离子源还是比较熟的,不知道您知不知道哪里可以买到Mark II的零配件,我们这之前的供应商的价钱比较高,相信你知道象Tip,Keeper 还有Gas Distributor用一段时间就要更换，成本比较高，我们想看看还有没有便宜的．谢谢！</div> <div class="postmsg">好东西，学习学习哈<br /> ，，，，，，，，，，，，，，，，</div> <div class="postmsg">To Wazxq:我以前有Mark II HECS电子版的结构图,但是现在找不到了，原理其实就是直流放电，大概过程是：充4个9以上的纯氩气，在Tip和Keeper之间加一个1000伏的脉冲电压来点火，如果一次没有起辉，可能脉冲电压要加几次，直到起辉，然后他们之间的电压会降低到几十伏，来维持一个稳定的放电来满足Beam电流的中和。<br /> 这里的核心技术是他的Tip，也是我们平时说的钽管，他是起辉的关键，真正的等离子体是在这个钽管里产生的，Tip和Keeper加偏压，是有象栅网的作用，把电子拉出来。</div> <div class="postmsg">To Daocaoren:<br /> 由于钽管工作时的温度很高,所以如果有氧气或者热的时候暴漏大气就会发生氧化,使其里面变成氧化钽,绝缘,这样中空阴极就不能起辉了,需要更换,所以要延长Tip的使用时间,就要防止热的时候有氧气.这样可以节省一些.<br /> 我们公司的钽管都是在一家深圳的公司买的,他的邮箱是<a href="mailto:cgc55555@yahoo.com.cn">cgc55555@yahoo.com.cn</a>,你发邮件给他要电话吧,呵呵, 我这些都是他跟我们讲的,感觉还是很有道理的.</div> <div class="postmsg">很好的学习材料,下了学习以下!感谢</div> <div class="postmsg">希望能差到rf離子源工作原理 謝謝分享</div> <div class="postmsg">确实是好东东,以前看了很多关于离子源的帖子和一些资料,但是都不如这个资料详细,我感觉看了之后,对离子源有了更清晰的理解!!!</div> <div class="postmsg">非常感谢！不知内容如何，先下来看看！</div> <div class="postmsg">下完了才知道 全是英文 像我们这初学者根本看不懂 唉 我的银子啊</div> <div class="postmsg">谢谢楼主的分享。<br /> 我们现在使用的就是RF ion source<br /> 是一份好资料</div> <div class="postmsg">好东西啊,就是全英文的看起来困难,还好有有道</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a 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