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src="static/image/filetype/msoffice.gif" border="0" class="vm" alt="" /> 极紫外光刻 .doc</h1> </div> <div class="bm_c xld"> <div class="attbox_right_ad"> </div> <div class="attbox_left"> <ul> <li>打开方式: Microsoft Word 2003</li> <li>资料大小: 227 KB</li> <li>下载次数: 4</li> <li>上传会员: <a href="attachcenter-list.html?uid=1968" target="_blank" style="color:#FF9900">ds1234567</a></li> <li>上传时间: 2007-09-10</li> <li>本站网址: <a href="http://forum.oecr.com/">forum.oecr.com</a></li> <li><a href="http://bbs.oecr.com/thread-53346-1-1.html" target="_blank">查看资料所在的主题</a></li> <li><a href="http://bbs.oecr.com/forum.php?mod=attachment&aid=MTM2MTN8MmRkYWQ3MTN8MTc2NjAwODQ0MXwwfDA%3D" target="_blank" style="color:#FF9900">下载资料 </a></li> </ul> </div> <DIV style="CLEAR: both"></DIV> <b>欢迎下载本站资料，下载前请先登录您的社区账号。</b></div> </div> <DIV style="CLEAR: both"></DIV> <div class="bm cl" style="padding:5px;"> <p><button type="submit" class="pn vm" onclick="setCopy('http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=13613', '链接已经复制到剪贴板');" type="submit"> <em>复制链接推荐给好友</em></button> <input type="text" class="px vm" onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://forum.oecr.com/plugin.php?id=attachcenter:page&aid=13613" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>请问国内那儿平面加工水平能达到λ/100的加工精度:</b><div class="postmsg">欲加工一高质量平板，请问国内那儿平面加工水平能达到λ/100的加工精度？材料为融石英</div> <div class="postmsg"><p>全地球还没有检测手段.</p><p>包括最高精度的ZYGO干涉仪系列,也只能测到1/60个波长(632.8).</p><p>而且出口到中国境内的,没有超过1/20的</p><p>飞宇光电</p><p>http://www.opticres.com</p><p></p></div> <div class="postmsg"><p>要看元件尺寸大小，λ=632.8nm，这个精度（PV值）基本上用于极紫外光刻，不过国内还不行，与欧美差距还是很大。</p></div> <div class="postmsg">你是说PV值还是RMS？找Zygo在上海的代理，莱特太平洋公司，好像日本有。</div> <div class="postmsg"><p>那加工就得不计成本了！而且也没有具体时间了！最主要的检测！！！！用什么检测？</p></div> <div class="postmsg">是啊就是检测没有方法，没有检测设备从何谈加工精度。这也反映国内加工业的一个问题，高精度检测设备的自主研发技术不行，这也是导致国内加工业停滞不前的根本原因。现在的许多光学加工企业都是小作坊式的模式，靠国内的廉价劳动力来争市场而不是靠技术，我想这样的企业发展模式是很难作大作强的。</div> <div class="postmsg">60mm口径,1/100波长,倒......我的个老天......你让我用环抛拖N年都没有希望.关键是没有办法检验呢.</div> <div class="postmsg">我说个方法可以试试，78年五机部来鉴定300口径干涉仪时，国内来了几个专家，当时认为三面法可以证明，液面法不能被证明，只能被推算，所以标准平面三面法计算的。液面法：当用汞或硅油做参比表面，其表面半径是地球的半径值，地球半径均值6371001.00米，激光取632.8nm，用半径与矢高公式计算，计算结果是盛液盘直径300mm液面比几何平面凸起1/179道圈，在直径60内凸起1/4479道圈，平行光束来自长焦距光管，只是不能被验证具体值。</div> <div class="postmsg">利达光电 南阳(原508厂) <br /> 目前超光滑可以做到nm级努点力完全可以满足你的需求！</div> <div class="postmsg">如果是rms为λ/100,很多科研单位应该可以做到<br /> <br /> 10L的那个计算,我也曾算过8m口径的液面与平面的偏离量</div> <div class="postmsg">看了11楼的贴我想到了，如果用环抛机加工直径为600mm的一块平板玻璃，光圈达到1个，就可以切割出100块直径60mm的光圈0.01的零件。<br /> <br /> [<i> 本帖最后由 ds1234567 于 2007-8-31 09:19 编辑 </i>]</div> <div class="postmsg">难道现在还没有用X射线检测的方法吗? 盼高人出现.</div> <div class="postmsg">别等白马王子啦，王子在宫中，外面都是白马。看看下面的文章，巨大的利益竞争王子无暇出宫。</div> <div class="postmsg">我是过来长见识的，各位还真是专业！</div> <div class="postmsg">楼主看你的玉照真可爱，系个红头绳，大眼睛扑打扑打的，但你倒是说句话，干不干那（加工零件意）。嗨，要是有意思就谈谈，不免强。哥哥邮箱 <a href="mailto:zwx2284587@163.com">zwx2284587@163.com</a></div> <div class="postmsg">只要检测跟的上，就能满足客户需求</div> <div class="postmsg">不是大平面镜悬在液面之上，平板直径大于300毫米时，自重会使表面向下凸起。是把平板浸在液体中，液面高于玻璃面少许，整个装置要恒温避免液体对流，罩上罩子避免空气扰动，避免振动。温度梯度要控制。现在高精度的干涉仪都让镜片测立着，将干涉仪做成卧式。</div> <div class="postmsg">要检测很难很难，没有设备和那环境</div> <div class="postmsg">还有一个重要的问题，厚度？？？？？？<br /> 厚度大的我想国内应该可以做到的，只是没有办法检测<br /> 厚度小于３ＭＭ 就８８</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" 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